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Gerald Richter
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Aalen-Hofen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for improving the imaging properties of a projection objecti...
Patent number
9,581,813
Issue date
Feb 28, 2017
Carl Zeiss SMT GmbH
Olaf Conradi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for improving the imaging properties of a projection objecti...
Patent number
9,069,263
Issue date
Jun 30, 2015
Carl Zeiss SMT GmbH
Olaf Conradi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for improving the imaging properties of a projection objecti...
Patent number
7,777,963
Issue date
Aug 17, 2010
Carl Zeiss SMT AG
Olaf Conradi
G02 - OPTICS
Information
Patent Grant
Projection exposure system
Patent number
7,457,043
Issue date
Nov 25, 2008
Carl Zeiss SMT AG
Bernhard Kneer
G02 - OPTICS
Information
Patent Grant
Projection exposure system
Patent number
7,408,621
Issue date
Aug 5, 2008
Carl Zeiss SMT AG
Bernhard Kneer
G02 - OPTICS
Information
Patent Grant
Microlithography projection objective including deformable mirror w...
Patent number
7,294,814
Issue date
Nov 13, 2007
Carl Zeiss SMT AG
Cristian Wagner
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective with adaptive mirror and projecti...
Patent number
7,112,772
Issue date
Sep 26, 2006
Carl Zeiss SMT AG
Cristian Wagner
G02 - OPTICS
Information
Patent Grant
System for flushing at least one internal space of an objective
Patent number
6,825,914
Issue date
Nov 30, 2004
Carl Zeiss SMT AG
Joachim Schroeder
G02 - OPTICS
Information
Patent Grant
Illuminating arrangement including a zoom objective incorporating t...
Patent number
5,675,401
Issue date
Oct 7, 1997
Carl Zeiss-Stiftung
Johannes Wangler
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTI...
Publication number
20150293352
Publication date
Oct 15, 2015
Carl Zeiss SMT GMBH
Olaf Conradi
G02 - OPTICS
Information
Patent Application
METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTI...
Publication number
20100290024
Publication date
Nov 18, 2010
Carl Zeiss SMT AG
Olaf Conradi
G02 - OPTICS
Information
Patent Application
Method for Improving the Imaging Properties of a Projection Objecti...
Publication number
20080310029
Publication date
Dec 18, 2008
Carl Zeiss SMT AG
Olaf Conradi
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH ADAPTIVE MIRROR AND PROJECTI...
Publication number
20080055740
Publication date
Mar 6, 2008
Carl Zeiss SMT AG
Christian Wagner
G02 - OPTICS
Information
Patent Application
Projection Exposure System
Publication number
20070171539
Publication date
Jul 26, 2007
Carl Zeiss SMT AG, a Germany corporation
Bernhard Kneer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH ADAPTIVE MIRROR AND PROJECTI...
Publication number
20070012871
Publication date
Jan 18, 2007
Christian Wagner
G02 - OPTICS
Information
Patent Application
Projection exposure system
Publication number
20060170897
Publication date
Aug 3, 2006
Bernhard Kneer
G02 - OPTICS
Information
Patent Application
Catadioptric projection objective with adaptive mirror and projecti...
Publication number
20040144915
Publication date
Jul 29, 2004
Cristian Wagner
G02 - OPTICS
Information
Patent Application
Projection exposure system
Publication number
20030063268
Publication date
Apr 3, 2003
Bernhard Kneer
G02 - OPTICS
Information
Patent Application
System for flushing at least one internal space of an objective
Publication number
20020155384
Publication date
Oct 24, 2002
Carl-Zeiss-Stiftung trading as Carl Zeiss
Joachim Schroeder
G02 - OPTICS