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Gerardus Carolus Johannus HOFMANS
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method of measuring focus of a lithographic projection apparatus
Patent number
8,289,516
Issue date
Oct 16, 2012
ASML Netherlands B.V.
Gerardus Carolus Johannus Hofmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring a lithographic projection apparatus
Patent number
8,208,122
Issue date
Jun 26, 2012
ASML Netherlands B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, calibration method, device manufacturing me...
Patent number
7,502,096
Issue date
Mar 10, 2009
ASML Netherlands B.V.
Jeffrey Godefridus Cornelis Tempelaars
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing methods, mask and meth...
Patent number
7,379,154
Issue date
May 27, 2008
ASML Netherlands, B.V.
Richard Joseph Bruls
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF MEASURING FOCUS OF A LITHOGRAPHIC PROJECTION APPARATUS
Publication number
20130003031
Publication date
Jan 3, 2013
ASML NETHERLANDS B.V.
Gerardus Carolus Johannus HOFMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Calibration Method and Inspection Apparatus
Publication number
20120013875
Publication date
Jan 19, 2012
ASML NETHERLANDS B.V.
Hubertus Antonius GERAETS
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF MEASURING PROPERTIES OF DYNAMIC POSITIONING ERRORS IN A L...
Publication number
20110153265
Publication date
Jun 23, 2011
ASML NETHERLANDS B.V.
Frank STAALS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090305151
Publication date
Dec 10, 2009
ASML NETHERLANDS B.V.
Gerardus Carolus Johannus HOFMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MEASURING A LITHOGRAPHIC PROJECTION APPARATUS
Publication number
20090268182
Publication date
Oct 29, 2009
ASML NETHERLANDS B.V.
Frank STAALS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MEASURING FOCUS OF A LITHOGRAPHIC PROJECTION APPARATUS
Publication number
20090135389
Publication date
May 28, 2009
ASML NETHERLANDS B.V.
Gerardus Carolus Johannus HOFMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing methods, mask and meth...
Publication number
20080137049
Publication date
Jun 12, 2008
ASML NETHERLANDS B.V.
Johannes Christiaan Maria Jasper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, calibration method, device manufacturing me...
Publication number
20070181827
Publication date
Aug 9, 2007
ASML NETHERLANDS B.V.
Jeffrey Godefridus Cornelis Tempelaars
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing methods, mask and meth...
Publication number
20050140949
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Johannes Christiaan Maria Jasper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY