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Gerardus Fernandus Ten Berge
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Oosterhout, NL
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Patents Grants
last 30 patents
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Patent Grant
Charged particle optical system comprising an electrostatic deflector
Patent number
8,110,813
Issue date
Feb 7, 2012
Mapper Lithography IP B.V.
Norman Hendrikus Rudolf Baars
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Charged particle optical system comprising an electrostatic deflector
Publication number
20100276606
Publication date
Nov 4, 2010
MAPPER LITHOGRAPHY IP BV
Norman Hendrikus Rudolf BAARS
B82 - NANO-TECHNOLOGY