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Gerd Eckert
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Goettingen, DE
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last 30 patents
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Patent Grant
VUV laser beam characterization system
Patent number
6,624,424
Issue date
Sep 23, 2003
Lambda Physik AG
Gerd Eckert
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
VUV LASER BEAM CHARACTERIZATION SYSTEM
Publication number
20030150997
Publication date
Aug 14, 2003
Gerd Eckert
G01 - MEASURING TESTING