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Gerd Klose
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for determining the registration of a structure on a photoma...
Patent number
10,113,864
Issue date
Oct 30, 2018
Carl Zeiss SMT GmbH
Michael Arnz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for connecting an optical element to a frame
Patent number
9,604,299
Issue date
Mar 28, 2017
Carl Zeiss SMT GmbH
Armin Schoeppach
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for determining the registration of a structure on a photoma...
Patent number
9,303,975
Issue date
Apr 5, 2016
Carl Zeiss SMT GmbH
Michael Arnz
G01 - MEASURING TESTING
Information
Patent Grant
Autofocus device and autofocusing method for an imaging device
Patent number
9,229,209
Issue date
Jan 5, 2016
Carl Zeiss SMT GmbH
Michael Arnz
G02 - OPTICS
Information
Patent Grant
Method and apparatus for measuring structures on photolithography m...
Patent number
8,736,849
Issue date
May 27, 2014
Carl Zeiss SMS GmbH
Ulrich Stroessner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method For Determining The Registration Of A Structure On A Photoma...
Publication number
20160195387
Publication date
Jul 7, 2016
Carl Zeiss SMT GMBH
Michael Arnz
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
Publication number
20150008215
Publication date
Jan 8, 2015
Carl Zeiss SMT GMBH
Armin Schoeppach
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method For Determining The Registration Of A Structure On A Photoma...
Publication number
20120063666
Publication date
Mar 15, 2012
Michael Arnz
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING STRUCTURES ON PHOTOLITHOGRAPHY M...
Publication number
20110242544
Publication date
Oct 6, 2011
CARL ZEISS SMS GMBH
Ulrich Stroessner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AUTOFOCUS DEVICE AND AUTOFOCUSING METHOD FOR AN IMAGING DEVICE
Publication number
20110134308
Publication date
Jun 9, 2011
Michael Arnz
G02 - OPTICS