Gerd Klose

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 8,705,006
- Issue date Apr 22, 2014
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for calibrating a specimen stage of a metrology system and m...
- Patent number 8,473,237
- Issue date Jun 25, 2013
- Carl Zeiss SMS GmbH
- Alexander Huebel
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining the position of a structure on...
- Patent number 8,369,605
- Issue date Feb 5, 2013
- Carl Zeiss SMS GmbH
- Michael Arnz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for determining the relative overlay shift of...
- Patent number 8,260,033
- Issue date Sep 4, 2012
- Carl Zeiss SMS GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for range-resolved determination of scattered lig...
- Patent number 7,755,748
- Issue date Jul 13, 2010
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for the range-resolved determination of scattered light, ope...
- Patent number 7,408,631
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...
- Publication number 20100241384
- Publication date Sep 23, 2010
- CARL ZEISS SMS GMBH
- Alexander Huebel
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE RELATIVE OVERLAY SHIFT OF...
- Publication number 20100208935
- Publication date Aug 19, 2010
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
- Publication number 20100153059
- Publication date Jun 17, 2010
- Gerd Klose
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE POSITION OF A STRUCTURE ON...
- Publication number 20100104128
- Publication date Apr 29, 2010
- Michael Arnz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20090244508
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEVICE AND METHOD FOR RANGE-RESOLVED DETERMINATION OF SCATTERED LIG...
- Publication number 20080285018
- Publication date Nov 20, 2008
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device for the range-resolved determination of scattered light, ope...
- Publication number 20050264819
- Publication date Dec 1, 2005
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Method and device for connecting an optical element to a frame

Method for calibrating a specimen stage of a metrology system and m...

Method and apparatus for determining the position of a structure on...

Method and apparatus for determining the relative overlay shift of...

Device and method for range-resolved determination of scattered lig...

Device for the range-resolved determination of scattered light, ope...

Patents Applicationslast 30 patents

METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...

METHOD AND APPARATUS FOR DETERMINING THE RELATIVE OVERLAY SHIFT OF...

APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK

METHOD AND APPARATUS FOR DETERMINING THE POSITION OF A STRUCTURE ON...

METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME

DEVICE AND METHOD FOR RANGE-RESOLVED DETERMINATION OF SCATTERED LIG...

Device for the range-resolved determination of scattered light, ope...