Gerd Scheuring

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Muenchen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for an automatic optical measuring of an OPC structure
- Patent number 7,460,962
- Issue date Dec 2, 2008
- Muetec Automatisierte Mikroskopie und Messtecknik GmbH
- Hans-Juergen Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for measuring feature widths on masks for the semiconduct...
- Patent number 7,375,792
- Issue date May 20, 2008
- Leica Microsystems Semiconductor GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and device for inspecting a disk-shaped object
- Publication number 20090316981
- Publication date Dec 24, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Juergen Brueck
- G01 - MEASURING TESTING
Information Patent Application
Arrangement and method for improving the measurement accuracy in th...
- Publication number 20090066970
- Publication date Mar 12, 2009
- MueTec Automatisierte Mikroskopie und Messtechnik GmbH
- Gerd Scheuring
- G01 - MEASURING TESTING
Information Patent Application
Device for Inspecting a Microscopic Component
- Publication number 20080259327
- Publication date Oct 23, 2008
- Vistec Semiconductor Systems GmbH
- Hans-Juergen Brueck
- G02 - OPTICS
Information Patent Application
Method for an automatic optical measuring of an OPC structure
- Publication number 20080071479
- Publication date Mar 20, 2008
- Hans-Juergen Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR INSPECTING A MICROSCOPIC COMPONENT BY MEANS OF AN IMMERS...
- Publication number 20070206279
- Publication date Sep 6, 2007
- Vistec Semiconductor Systems GmbH
- Hans-Juergen Brueck
- G02 - OPTICS
Information Patent Application
APPARATUS FOR MEASURING FEATURE WIDTHS ON MASKS FOR THE SEMICONDUCT...
- Publication number 20050084770
- Publication date Apr 21, 2005
- Leica Microsystems Semiconductor GmbH
- Wolfgang Vollrath
- G02 - OPTICS