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Gerhard Fuerter
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Ellwangen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Optical projection system
Patent number
9,891,535
Issue date
Feb 13, 2018
Carl Zeiss SMT GmbH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical projection system
Patent number
9,557,653
Issue date
Jan 31, 2017
Carl Zeiss SMT GmbH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical projection system
Patent number
9,104,016
Issue date
Aug 11, 2015
Carl Zeiss SMT GmbH
Johannes Rau
G02 - OPTICS
Information
Patent Grant
Illumination system for a microlithgraphic exposure apparatus
Patent number
8,873,151
Issue date
Oct 28, 2014
Carl Zeiss SMT GmbH
Alexander Sohmer
G02 - OPTICS
Information
Patent Grant
Optical projection system
Patent number
8,300,210
Issue date
Oct 30, 2012
Carl Zeiss SMT GmbH
Johannes Rau
G02 - OPTICS
Information
Patent Grant
Symmetrical objective having four lens groups for microlithography
Patent number
7,697,211
Issue date
Apr 13, 2010
Carl Zeiss SMT AG
David R. Shafer
G02 - OPTICS
Information
Patent Grant
Projection exposure system having a reflective reticle
Patent number
RE40743
Issue date
Jun 16, 2009
Carl Zeiss SMT AG
Gerhard Fuerter
359 - Optical: systems and elements
Information
Patent Grant
Optical beam transformation system and illumination system comprisi...
Patent number
7,511,886
Issue date
Mar 31, 2009
Carl Zeiss SMT AG
Joerg Schultz
G02 - OPTICS
Information
Patent Grant
Optical system, in particular illumination system, of a microlithog...
Patent number
7,405,808
Issue date
Jul 29, 2008
Carl Zeiss SMT AG
Toralf Gruner
G02 - OPTICS
Information
Patent Grant
Projection objective for microlithography
Patent number
7,271,876
Issue date
Sep 18, 2007
Carl Zeiss SMT AG
Wilhelm Ulrich
G02 - OPTICS
Information
Patent Grant
Spectacle lens having astigmatic power
Patent number
4,613,217
Issue date
Sep 23, 1986
Carl-Zeiss-Stiftung, Heidenheim/Brenz
Gerhard Fuerter
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Optical Projection System
Publication number
20180259856
Publication date
Sep 13, 2018
Carl Zeiss SMT GMBH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical Projection System
Publication number
20170219929
Publication date
Aug 3, 2017
Carl Zeiss SMT GMBH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL PROJECTION SYSTEM
Publication number
20150323873
Publication date
Nov 12, 2015
Carl Zeiss SMT GMBH
Johannes Rau
G02 - OPTICS
Information
Patent Application
OPTICAL PROJECTION SYSTEM
Publication number
20130044304
Publication date
Feb 21, 2013
Carl Zeiss SMT GMBH
Johannes Rau
G02 - OPTICS
Information
Patent Application
Optical Projection System
Publication number
20090174874
Publication date
Jul 9, 2009
Johannes Rau
G02 - OPTICS
Information
Patent Application
SYMMETRICAL OBJECTIVE HAVING FOUR LENS GROUPS FOR MICROLITHOGRAPHY
Publication number
20090080086
Publication date
Mar 26, 2009
Carl Zeiss SMT AG
David R. Shafer
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
Publication number
20080049320
Publication date
Feb 28, 2008
Carl Zeiss SMT AG
Wilhelm Ulrich
G02 - OPTICS
Information
Patent Application
Optical beam transformation system and illumination system comprisi...
Publication number
20060146384
Publication date
Jul 6, 2006
Carl Zeiss SMT AG
Joerg Schultz
G02 - OPTICS
Information
Patent Application
Optical system, in particular illumination system, of a microlithog...
Publication number
20050152046
Publication date
Jul 14, 2005
Toralf Gruner
G02 - OPTICS
Information
Patent Application
Projection objective for microlithography
Publication number
20050134826
Publication date
Jun 23, 2005
Carl Zeiss SMT AG
Wilhelm Ulrich
G02 - OPTICS