Gerhard Huber

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Tutzing, DE

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Patents Grantslast 30 patents

Information Patent Grant
Beam control apparatus for an illumination beam and metrology syste...
- Patent number 8,988,752
- Issue date Mar 24, 2015
- Carl Zeiss SMT GmbH
- Marten Krebs
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
BEAM CONTROL APPARATUS FOR AN ILLUMINATION BEAM AND METROLOGY SYSTE...
- Publication number 20130120820
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Marten Krebs
- G02 - OPTICS