Gerhard Spatzier

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method of automatically separating stacked wafers
- Patent number 5,213,451
- Issue date May 25, 1993
- Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
- Walter Frank
- H01 - BASIC ELECTRIC ELEMENTS