Gerhard Westerberg

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Djursholm, SE

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for inspecting micromask patterns
- Patent number 4,465,350
- Issue date Aug 14, 1984
- Gerhard Westerberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compensating device
- Patent number 4,385,835
- Issue date May 31, 1983
- Micronic AB
- Gerhard Westerberg
- G01 - MEASURING TESTING