Gerhard-Wilhelm Ziegler

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 10,191,382
- Issue date Jan 29, 2019
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 10,088,754
- Issue date Oct 2, 2018
- Carl Zeiss SMT GmbH
- Axel Scholz
- G02 - OPTICS
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,977,333
- Issue date May 22, 2018
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,933,706
- Issue date Apr 3, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Facet mirror device
- Patent number 9,645,388
- Issue date May 9, 2017
- Carl Zeiss SMT GmbH
- Gerhard-Wilhelm Ziegler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 9,606,441
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,599,904
- Issue date Mar 21, 2017
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,454,085
- Issue date Sep 27, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,310,694
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 9,280,060
- Issue date Mar 8, 2016
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,091,945
- Issue date Jul 28, 2015
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Illumination system for microlithography
- Patent number 8,873,023
- Issue date Oct 28, 2014
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 8,467,031
- Issue date Jun 18, 2013
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20180335702
- Publication date Nov 22, 2018
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20180314165
- Publication date Nov 1, 2018
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20170351183
- Publication date Dec 7, 2017
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20170261861
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20170192361
- Publication date Jul 6, 2017
- Carl Zeiss SMT GMBH
- Axel Scholz
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20160187789
- Publication date Jun 30, 2016
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20160161858
- Publication date Jun 9, 2016
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150286150
- Publication date Oct 8, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20150022798
- Publication date Jan 22, 2015
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FACET MIRROR DEVICE
- Publication number 20140022658
- Publication date Jan 23, 2014
- Gerhard-Wilhelm Ziegler
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20130250264
- Publication date Sep 26, 2013
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20130021591
- Publication date Jan 24, 2013
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20120019796
- Publication date Jan 26, 2012
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20100265482
- Publication date Oct 21, 2010
- Carl Zeiss SMT AG
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Gerhard-Wilhelm Ziegler

Person

Patents Grantslast 30 patents

Illumination system for illuminating a mask in a microlithographic...

Illumination system for microlithography

Illumination system for illuminating a mask in a microlithographic...

Illumination system of a microlithographic projection exposure appa...

Facet mirror device

Illumination system for microlithography

Illumination system for illuminating a mask in a microlithographic...

Illumination system of a microlithographic projection exposure appa...

Illumination system for illuminating a mask in a microlithographic...

Illumination system for microlithography

Illumination system of a microlithographic projection exposure appa...

Illumination system for microlithography

Illumination system for illuminating a mask in a microlithographic...

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

FACET MIRROR DEVICE

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...