Gerhart Fuerter

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Ellwangen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Arrangement of optical elements in a microlithographic projection e...
- Patent number 7,474,469
- Issue date Jan 6, 2009
- Carl Zeiss SMT AG
- Michael Totzeck
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Arrangement of optical elements in a microlithographic projection e...
- Publication number 20060066962
- Publication date Mar 30, 2006
- Carl Zeiss SMT AG
- Michael Totzeck
- G02 - OPTICS