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Gerry M. Blumenstock
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San Diego, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Extreme ultraviolet light source
Patent number
7,368,741
Issue date
May 6, 2008
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Discharge produced plasma EUV light source
Patent number
7,291,853
Issue date
Nov 6, 2007
Cymer, Inc.
Igor V. Fomenkov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Grant
Collector for EUV light source
Patent number
7,217,940
Issue date
May 15, 2007
Cymer, Inc.
William N. Partlo
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light source
Patent number
6,972,421
Issue date
Dec 6, 2005
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Extreme ultraviolet light source
Publication number
20100176313
Publication date
Jul 15, 2010
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source
Publication number
20080023657
Publication date
Jan 31, 2008
Cymer, Inc.
Stephen T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Discharge produced plasma EUV light source
Publication number
20070023711
Publication date
Feb 1, 2007
Igor V. Fomenkov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Collector for EUV light source
Publication number
20060131515
Publication date
Jun 22, 2006
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source
Publication number
20050230645
Publication date
Oct 20, 2005
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Discharge produced plasma EUV light source
Publication number
20040160155
Publication date
Aug 19, 2004
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source
Publication number
20040108473
Publication date
Jun 10, 2004
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR