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Gertraud Lammer
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Vienna, AT
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Patents Grants
last 30 patents
Information
Patent Grant
Particle-optical projection system
Patent number
7,388,217
Issue date
Jun 17, 2008
IMS Nanofabrication GmbH
Herbert Buschbeck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle-optic electrostatic lens
Patent number
7,199,373
Issue date
Apr 3, 2007
IMS Nanofabrication GmbH
Gerhard Stengl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern-definition device for maskless particle-beam exposure appar...
Patent number
7,084,411
Issue date
Aug 1, 2006
IMS Nanofabrication GmbH
Wolfgang Lammer-Pachlinger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Maskless particle-beam system for exposing a pattern on a substrate
Patent number
6,768,125
Issue date
Jul 27, 2004
IMS Nanofabrication, GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle-optical imaging system for lithography purposes
Patent number
6,326,632
Issue date
Dec 4, 2001
IMS-Ionen Mikrofabrikations Systeme GmbH
Herbert Buschbeck
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Ion source
Patent number
5,317,161
Issue date
May 31, 1994
IMS Ionen Mikrofabrikations Systeme Gesellschaft mbH
Alfred Chalupka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Particle-optical projection system
Publication number
20070125956
Publication date
Jun 7, 2007
Herbert Buschbeck
B82 - NANO-TECHNOLOGY
Information
Patent Application
Particle-optical projection system
Publication number
20050201246
Publication date
Sep 15, 2005
IMS Nanofabrication GmbH
Herbert Buschbeck
B82 - NANO-TECHNOLOGY
Information
Patent Application
Pattern-definition device for maskless particle-beam exposure appar...
Publication number
20050087701
Publication date
Apr 28, 2005
IMS Nanofabrication GmbH
Wolfgang Lammer-Pachlinger
B82 - NANO-TECHNOLOGY
Information
Patent Application
Particle-optic electrostatic lens
Publication number
20050072933
Publication date
Apr 7, 2005
Gerhard Stengl
B82 - NANO-TECHNOLOGY
Information
Patent Application
Maskless particle-beam system for exposing a pattern on a substrate
Publication number
20030155534
Publication date
Aug 21, 2003
Elmar Platzgummer
B82 - NANO-TECHNOLOGY
Information
Patent Application
Thermal control of image pattern distortions
Publication number
20020148976
Publication date
Oct 17, 2002
Alfred Chalupka
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic imaging of a structure pattern onto one or more fields...
Publication number
20010036588
Publication date
Nov 1, 2001
IMS-Ionen Mikrofabrikations Systeme GmbH
Herbert Buschbeck
B82 - NANO-TECHNOLOGY