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Gi Youl Kim
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming TiSiN thin film layer by using atomic layer depo...
Patent number
9,159,608
Issue date
Oct 13, 2015
Aixtron SE
Woong Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Transient enhanced atomic layer deposition
Patent number
7,981,473
Issue date
Jul 19, 2011
Aixtron, Inc.
Gi Youl Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Purged heater-susceptor for an ALD/CVD reactor
Patent number
7,015,426
Issue date
Mar 21, 2006
Genus, Inc.
Ken Doering
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
DEVICE AND METHOD TO CONTROL THE UNIFORMITY OF A GAS FLOW IN A CVD...
Publication number
20180128647
Publication date
May 10, 2018
AIXTRON SE
Gi Youl Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPO...
Publication number
20150050806
Publication date
Feb 19, 2015
AIXTRON SE
Woong Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transient enhanced atomic layer deposition
Publication number
20080131601
Publication date
Jun 5, 2008
Gi Youl Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Purged heater-susceptor for an ALD/CVD reactor
Publication number
20040211764
Publication date
Oct 28, 2004
Ken Doering
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Systems and methods for improved gas delivery
Publication number
20040065256
Publication date
Apr 8, 2004
Gi Youl Kim
B08 - CLEANING