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Turbomolecular pump
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Patent number 5,688,106
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Issue date Nov 18, 1997
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Varian Associates, Inc.
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Roberto Cerruti
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Pumping state turbomolecular pumps
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Patent number 5,387,079
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Issue date Feb 7, 1995
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Varian Associates, Inc.
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Giampaolo Levi
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Turbomolecular pump
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Patent number 5,238,362
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Issue date Aug 24, 1993
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Varian Associates, Inc.
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Fausto Casaro
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Stator assembly for a turbomolecular pump
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Patent number 5,158,426
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Issue date Oct 27, 1992
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Varian Associates, Inc.
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Fausto Casaro
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...