Gian Francesco Lorusso

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for e-beam scanning
- Patent number 7,276,690
- Issue date Oct 2, 2007
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for accurate e-beam metrology
- Patent number 7,098,456
- Issue date Aug 29, 2006
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Automated focusing of electron image
- Patent number 7,041,976
- Issue date May 9, 2006
- KLA-Tencor Technologies Corporation
- Mark A. Neil
- G01 - MEASURING TESTING
Information Patent Grant
Methods of stabilizing measurement of ArF resist in CD-SEM
- Patent number 7,015,468
- Issue date Mar 21, 2006
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SEM profile and surface reconstruction using multiple data sets
- Patent number 6,930,308
- Issue date Aug 16, 2005
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for e-beam scanning
- Patent number 6,815,675
- Issue date Nov 9, 2004
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Energy filter multiplexing
- Patent number 6,784,425
- Issue date Aug 31, 2004
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Undercut measurement using SEM
- Patent number 6,670,612
- Issue date Dec 30, 2003
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
UNDERCUT MEASUREMENT USING SEM
- Publication number 20040000638
- Publication date Jan 1, 2004
- Gian Francesco Lorusso
- G01 - MEASURING TESTING

Gian Francesco Lorusso

Person

Patents Grantslast 30 patents

Method and system for e-beam scanning

Method and apparatus for accurate e-beam metrology

Automated focusing of electron image

Methods of stabilizing measurement of ArF resist in CD-SEM

SEM profile and surface reconstruction using multiple data sets

Method and system for e-beam scanning

Energy filter multiplexing

Undercut measurement using SEM

Patents Applicationslast 30 patents

UNDERCUT MEASUREMENT USING SEM