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Giovanni Ferrara
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Singapore, SG
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last 30 patents
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Patent Grant
Integrated defect detection and location systems and methods in sem...
Patent number
10,168,387
Issue date
Jan 1, 2019
Infineon Technologies Austria AG
Cheow Guan Lim
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
INTEGRATED DEFECT DETECTION AND LOCATION SYSTEMS AND METHODS IN SEM...
Publication number
20140013171
Publication date
Jan 9, 2014
Cheow Guan Lim
G01 - MEASURING TESTING