Giovanni Luca GATTOBIGIO

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid handling structure for lithographic apparatus
- Patent number 11,860,546
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Pepijn Van Den Eijnden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, a lithographic apparatus, a method of usi...
- Patent number 11,809,086
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Raphael Nico Johan Stegen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 11,774,857
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process tool and an inspection method
- Patent number 11,720,032
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Raphael Nico Johan Stegen
- G01 - MEASURING TESTING
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 11,614,689
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid handling structure for lithographic apparatus
- Patent number 11,454,892
- Issue date Sep 27, 2022
- ASML Netherlands B.V.
- Pepijn Van Den Eijnden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method and computer program
- Patent number 11,372,339
- Issue date Jun 28, 2022
- ASML Netherlands B.V.
- Giovanni Luca Gattobigio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 11,372,336
- Issue date Jun 28, 2022
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 11,231,653
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid handling structure, lithographic apparatus, and method of usi...
- Patent number 11,156,921
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Raphael Nico Johan Stegen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performance testing working parameters of a fluid handlin...
- Patent number 11,143,969
- Issue date Oct 12, 2021
- ASML Netherlands B.V.
- Giovanni Luca Gattobigio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning device and method of cleaning
- Patent number 11,086,239
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Miao Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure for lithographic apparatus
- Patent number 11,029,607
- Issue date Jun 8, 2021
- ASML Netherlands B.V.
- Pepijn Van Den Eijnden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 10,969,695
- Issue date Apr 6, 2021
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 10,859,919
- Issue date Dec 8, 2020
- ASML Netherlands B.V.
- Cornelius Maria Rops
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Inspection substrate and an inspection method
- Patent number 10,725,390
- Issue date Jul 28, 2020
- ASML Netherlands B.V.
- Seerwan Saeed
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, a lithographic apparatus and a method of operating...
- Patent number 10,571,810
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Daan Daniel Johannes Antonius Van Sommeren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 10,551,748
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Cornelius Maria Rops
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 10,416,571
- Issue date Sep 17, 2019
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, lithographic apparatus and method of operating a l...
- Patent number 10,317,804
- Issue date Jun 11, 2019
- ASML Netherlands B.V.
- Daan Daniel Johannes Antonius Van Sommeren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection substrate and an inspection method
- Patent number 10,216,100
- Issue date Feb 26, 2019
- ASML Netherlands B.V.
- Seerwan Saeed
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and a method of manufacturing a device using...
- Patent number 10,095,129
- Issue date Oct 9, 2018
- ASML Netherlands B.V.
- Giovanni Luca Gattobigio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20240248411
- Publication date Jul 25, 2024
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE
- Publication number 20240036477
- Publication date Feb 1, 2024
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20230418165
- Publication date Dec 28, 2023
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20230333480
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Christianus Wilhelmus Johannes BERENDSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
- Publication number 20230053840
- Publication date Feb 23, 2023
- ASML NETHERLANDS B.V.
- Pepijn VAN DEN EIJNDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20220308459
- Publication date Sep 29, 2022
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE MANUFACTURING METHOD AND COMPUTER PROGRAM
- Publication number 20220187717
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Giovanni Luca GATTOBIGIO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20220137519
- Publication date May 5, 2022
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS, A METHOD OF USI...
- Publication number 20220035254
- Publication date Feb 3, 2022
- ASML NETHERLANDS B.V.
- Raphael Nico Johan STEGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A PROCESS TOOL AND AN INSPECTION METHOD
- Publication number 20210349397
- Publication date Nov 11, 2021
- ASML NETHERLANDS B.V.
- Raphael Nico Johan STEGEN
- G01 - MEASURING TESTING
Information Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
- Publication number 20210263424
- Publication date Aug 26, 2021
- ASML NETHERLANDS B.V.
- Pepijn VAN DEN EIJNDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS, AND METHOD OF USI...
- Publication number 20210191275
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- Raphael Nico Johan STEGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20210181641
- Publication date Jun 17, 2021
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING DEVICE AND METHOD OF CLEANING
- Publication number 20210116824
- Publication date Apr 22, 2021
- ASML NETHERLANDS B.V.
- Miao YU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20210096471
- Publication date Apr 1, 2021
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
- Publication number 20210088912
- Publication date Mar 25, 2021
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
- Publication number 20200409270
- Publication date Dec 31, 2020
- ASML NETHERLANDS B.V.
- Pepijn VAN DEN EIJNDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
- Publication number 20200166851
- Publication date May 28, 2020
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD OF PERFORMANCE TESTING WORKING PARAMETERS OF A FLUID HANDLIN...
- Publication number 20200150545
- Publication date May 14, 2020
- ASML NETHERLANDS B.V.
- Giovanni Luca GATTOBIGIO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20200004162
- Publication date Jan 2, 2020
- ASML NETHERLANDS H.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING...
- Publication number 20190265597
- Publication date Aug 29, 2019
- ASML NETHERLANDS B.V.
- Daan Daniel Johannes Antonius VAN SOMMEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Substrate and an Inspection Method
- Publication number 20190146352
- Publication date May 16, 2019
- ASML NETHERLANDS B.V.
- Seerwan Saeed
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20190004434
- Publication date Jan 3, 2019
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A L...
- Publication number 20180364584
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Daan Daniel Johannes Antonius VAN SOMMEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Substrate and an Inspection Method
- Publication number 20180181004
- Publication date Jun 28, 2018
- ASML NETHERLANDS B.V.
- Seerwan SAEED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE M...
- Publication number 20170363948
- Publication date Dec 21, 2017
- Cornelius Maria ROPS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A DEVICE USING...
- Publication number 20170131644
- Publication date May 11, 2017
- ASML NETHERLANDS B.V.
- Giovanni Luca GATTOBIGIO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Giovanni Luca GATTOBIGIO

Person

Patents Grantslast 30 patents

Fluid handling structure for lithographic apparatus

Fluid handling structure, a lithographic apparatus, a method of usi...

Lithography apparatus and device manufacturing method

Process tool and an inspection method

Fluid handling structure and lithographic apparatus

Fluid handling structure for lithographic apparatus

Device manufacturing method and computer program

Lithography apparatus and device manufacturing method

Fluid handling structure and lithographic apparatus

Fluid handling structure, lithographic apparatus, and method of usi...

Method of performance testing working parameters of a fluid handlin...

Cleaning device and method of cleaning

Fluid handling structure for lithographic apparatus

Fluid handling structure and lithographic apparatus

Fluid handling structure, a lithographic apparatus and a device man...

Inspection substrate and an inspection method

Substrate table, a lithographic apparatus and a method of operating...

Fluid handling structure, a lithographic apparatus and a device man...

Fluid handling structure and lithographic apparatus

Substrate table, lithographic apparatus and method of operating a l...

Inspection substrate and an inspection method

Lithographic apparatus and a method of manufacturing a device using...

Patents Applicationslast 30 patents

A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE

A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS

LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD

DEVICE MANUFACTURING METHOD AND COMPUTER PROGRAM

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS, A METHOD OF USI...

A PROCESS TOOL AND AN INSPECTION METHOD

FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS, AND METHOD OF USI...

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

CLEANING DEVICE AND METHOD OF CLEANING

LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...

FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...

METHOD OF PERFORMANCE TESTING WORKING PARAMETERS OF A FLUID HANDLIN...

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING...

Inspection Substrate and an Inspection Method

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A L...

Inspection Substrate and an Inspection Method

A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE M...

LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A DEVICE USING...