Givi Georgievitch Zukavishvili

Person

Moscow, RU

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus, radiation system and device manufacturing m...
- Patent number 8,018,574
- Issue date Sep 13, 2011
- ASML Netherlands B.V.
- Robert Rafilevitch Gayazov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source, lithographic apparatus, device manufacturing meth...
- Patent number RE41362
- Issue date Jun 1, 2010
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- 250 - Radiant energy
Information Patent Grant
Radiation generating device, lithographic apparatus, device manufac...
- Patent number 7,335,900
- Issue date Feb 26, 2008
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,279,690
- Issue date Oct 9, 2007
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus having a debris-mitigation system, a source...
- Patent number 7,251,012
- Issue date Jul 31, 2007
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation generating device, lithographic apparatus, device manufac...
- Patent number 7,208,746
- Issue date Apr 24, 2007
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source, lithographic apparatus, and device manufacturing...
- Patent number 6,933,510
- Issue date Aug 23, 2005
- ASML Netherlands B.V.
- Givi Georgievitch Zukavishvili
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Radiation source, lithographic apparatus, device manufacturing meth...
- Patent number 6,818,912
- Issue date Nov 16, 2004
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source, lithographic apparatus, device manufacturing meth...
- Patent number 6,667,484
- Issue date Dec 23, 2003
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus, radiation system and device manufacturing m...
- Publication number 20070001126
- Publication date Jan 4, 2007
- ASML NETHERLANDS B.V.
- Robert Rafilevitch Gayazov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060219950
- Publication date Oct 5, 2006
- ASML NETHERLANDS B.V.
- Levinus Pieter Bakker
- B82 - NANO-TECHNOLOGY
Information Patent Application
Radiation generating device, lithographic apparatus, device manufac...
- Publication number 20060071180
- Publication date Apr 6, 2006
- ASML NETHERLANDS B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation generating device, lithographic apparatus, device manufac...
- Publication number 20060011864
- Publication date Jan 19, 2006
- ASML NETHERLANDS B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source, lithographic apparatus, and device manufacturing...
- Publication number 20050253092
- Publication date Nov 17, 2005
- ASML NETHERLANDS B.V.
- Givi Georgievitch Zukavishvili
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Lithographic apparatus having a debris-mitigation system, a source...
- Publication number 20050140945
- Publication date Jun 30, 2005
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation source, lithographic apparatus, and device manufacturing...
- Publication number 20040141165
- Publication date Jul 22, 2004
- ASML NETHERLANDS B.V.
- Givi Georgievitch Zukavishvili
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Radiation source, lithographic apparatus, device manufacturing meth...
- Publication number 20040089819
- Publication date May 13, 2004
- ASML NETHERLANDS B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source, lithographic apparatus, device manufacturing meth...
- Publication number 20020021430
- Publication date Feb 21, 2002
- Konstantin Nikolaevitch Koshelev
- B82 - NANO-TECHNOLOGY

Givi Georgievitch Zukavishvili

Person

Patents Grantslast 30 patents

Lithographic apparatus, radiation system and device manufacturing m...

Radiation source, lithographic apparatus, device manufacturing meth...

Radiation generating device, lithographic apparatus, device manufac...

Lithographic apparatus and device manufacturing method

Lithographic apparatus having a debris-mitigation system, a source...

Radiation generating device, lithographic apparatus, device manufac...

Radiation source, lithographic apparatus, and device manufacturing...

Radiation source, lithographic apparatus, device manufacturing meth...

Radiation source, lithographic apparatus, device manufacturing meth...

Patents Applicationslast 30 patents

Lithographic apparatus, radiation system and device manufacturing m...

Lithographic apparatus and device manufacturing method

Radiation generating device, lithographic apparatus, device manufac...

Radiation generating device, lithographic apparatus, device manufac...

Radiation source, lithographic apparatus, and device manufacturing...

Lithographic apparatus having a debris-mitigation system, a source...

Radiation source, lithographic apparatus, and device manufacturing...

Radiation source, lithographic apparatus, device manufacturing meth...

Radiation source, lithographic apparatus, device manufacturing meth...