Gladys So-Wan Lo

Follow

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon nitride dry trim without top pulldown
- Patent number 8,431,461
- Issue date Apr 30, 2013
- Lam Research Corporation
- Qinghua Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist stripping chamber and methods of etching photoresist on...
- Patent number 7,605,063
- Issue date Oct 20, 2009
- Lam Research Corporation
- Robert P. Chebi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of etching photoresist on substrates
- Patent number 7,083,903
- Issue date Aug 1, 2006
- Lam Research Corporation
- Erik A. Edelberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
H2O vapor as a processing gas for crust, resist, and residue remova...
- Patent number 6,777,173
- Issue date Aug 17, 2004
- Lam Research Corporation
- Anthony Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for etching a gold metal layer using a titaniu...
- Patent number 6,554,952
- Issue date Apr 29, 2003
- Lam Research Corporation
- Gladys So-Wan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching a gold metal layer using a titanium hardmask
- Patent number 6,306,312
- Issue date Oct 23, 2001
- Lam Research Corporation
- Gladys So-Wan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Photoresist stripping chamber and methods of etching photoresist on...
- Publication number 20070264841
- Publication date Nov 15, 2007
- Lam Research Corporation
- Robert P. Chebi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of removing resist from substrates in resist stripping cham...
- Publication number 20060228889
- Publication date Oct 12, 2006
- Erik A. Edelberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods of etching photoresist on substrates
- Publication number 20060201911
- Publication date Sep 14, 2006
- Lam Research Corporation
- Erik A. Edelberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods of etching photoresist on substrates
- Publication number 20040256357
- Publication date Dec 23, 2004
- Erik A. Edelberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
H2O vapor as a processing gas for crust, resist, and residue remova...
- Publication number 20040043337
- Publication date Mar 4, 2004
- LAM RESEARCH CORPORATION
- Anthony Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY