Glen T. MORI

Person

Gilroy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,587,799
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Chien-Kang Hsiung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compliant robot blade for substrate support and transfer
- Patent number 11,348,823
- Issue date May 31, 2022
- Applied Materials, Inc.
- Steven V. Sansoni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for backside via reveal processing
- Patent number 11,289,387
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Prayudi Lianto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable frequency microwave (VFM) processes and applications in se...
- Patent number 10,629,430
- Issue date Apr 21, 2020
- Applied Materials, Inc.
- Loke Yuen Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support apparatus having reduced substrate particle gener...
- Patent number 10,431,489
- Issue date Oct 1, 2019
- Applied Materials, Inc.
- Pulkit Agarwal
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Compliant robot blade for defect reduction
- Patent number 10,312,127
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Steven V. Sansoni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable frequency microwave (VFM) processes and applications in se...
- Patent number 9,960,035
- Issue date May 1, 2018
- Applied Materials, Inc.
- Loke Yuen Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure and method of fabricating three-dimensional (3D) metal-in...
- Patent number 9,954,051
- Issue date Apr 24, 2018
- Applied Materials, Inc.
- Guan Huei See
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable frequency microwave (VFM) processes and applications in se...
- Patent number 9,548,200
- Issue date Jan 17, 2017
- Applied Materials, Inc.
- Loke Yuen Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer robot end effector
- Patent number 9,425,076
- Issue date Aug 23, 2016
- Applied Materials, Inc.
- Pulkit Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ chamber clean with inert hydrogen helium mixture during waf...
- Patent number 9,269,562
- Issue date Feb 23, 2016
- APPLIED MATERIALS, INC.
- Robert Dinsmore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for cleaning a substrate
- Patent number 9,177,782
- Issue date Nov 3, 2015
- Applied Materials, Inc.
- James Matthew Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated processing of porous dielectric, polymer-coated substrat...
- Patent number 9,171,714
- Issue date Oct 27, 2015
- Applied Materials, Inc.
- Glen T. Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Finned shutter disk for a substrate process chamber
- Patent number 9,147,558
- Issue date Sep 29, 2015
- Applied Materials, Inc.
- Bonnie T. Chia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron ionization for aluminum oxide etch enhancement
- Patent number 9,051,655
- Issue date Jun 9, 2015
- Applied Materials, Inc.
- Kai Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber having components with textured surfaces and method of manu...
- Patent number 6,933,025
- Issue date Aug 23, 2005
- Applied Materials, Inc.
- Shyh-Nung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber components having textured surfaces and method of manufacture
- Patent number 6,777,045
- Issue date Aug 17, 2004
- Applied Materials Inc.
- Shyh-Nung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preventing defect generation from targets through applying metal sp...
- Patent number 6,428,663
- Issue date Aug 6, 2002
- Applied Materials, Inc.
- Roman Mostovoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing target arcing during sputter depo...
- Patent number 6,416,634
- Issue date Jul 9, 2002
- Applied Materials, Inc.
- Roman Mostovoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing particle concentration within a semiconductor d...
- Patent number 6,379,428
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Roman Mostovoy
- B08 - CLEANING
Information Patent Grant
Method for manufacturing metal sputtering target for use in DC magn...
- Patent number 6,228,186
- Issue date May 8, 2001
- Applied Materials, Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for use in magnetron sputtering of aluminum for forming meta...
- Patent number 6,171,455
- Issue date Jan 9, 2001
- Applied Materials Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for use in magnetron sputtering of aluminum for forming meta...
- Patent number 6,126,791
- Issue date Oct 3, 2000
- Applied Materials, Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing particulate generation from regeneration of cry...
- Patent number 6,116,032
- Issue date Sep 12, 2000
- Applied Materials, Inc.
- Glen T. Mori
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Target for use in magnetron sputtering of aluminum for forming meta...
- Patent number 6,001,227
- Issue date Dec 14, 1999
- Applied Materials, Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT CARRIER HAVING MULTIPLE CERAMIC DISCS
- Publication number 20240249965
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Arvinder Manmohan Singh CHADHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EROSION RESISTANT METAL FLUORIDE COATINGS, METHODS OF PREPARATION A...
- Publication number 20220181124
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Ren-Guan Duan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR BACKSIDE VIA REVEAL PROCESSING
- Publication number 20220037216
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Prayudi LIANTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20210166953
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Chien-Kang HSIUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPLIANT ROBOT BLADE FOR DEFECT REDUCTION
- Publication number 20190267275
- Publication date Aug 29, 2019
- Applied Materials, Inc.
- STEVEN V. SANSONI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE FREQUENCY MICROWAVE (VFM) PROCESSES AND APPLICATIONS IN SE...
- Publication number 20180240666
- Publication date Aug 23, 2018
- Applied Materials, Inc.
- Loke Yuen WONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE FREQUENCY MICROWAVE (VFM) PROCESSES AND APPLICATIONS IN SE...
- Publication number 20170117146
- Publication date Apr 27, 2017
- Applied Materials, Inc.
- Loke Yuen WONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE AND METHOD OF FABRICATING THREE-DIMENSIONAL (3D) METAL-IN...
- Publication number 20170104056
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Guan Huei SEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER ROBOT END EFFECTOR
- Publication number 20160005638
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- PULKIT AGARWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT APPARATUS HAVING REDUCED SUBSTRATE PARTICLE GENER...
- Publication number 20150170954
- Publication date Jun 18, 2015
- Applied Materials, Inc.
- PULKIT AGARWAL
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
BORON IONIZATION FOR ALUMINUM OXIDE ETCH ENHANCEMENT
- Publication number 20150076110
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Kai WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPLIANT ROBOT BLADE FOR DEFECT REDUCTION
- Publication number 20150078874
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- STEVEN V. SANSONI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE FREQUENCY MICROWAVE (VFM) PROCESSES AND APPLICATIONS IN SE...
- Publication number 20150056819
- Publication date Feb 26, 2015
- Applied Materials, Inc.
- Loke Yuen WONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING A SUBSTRATE
- Publication number 20140251374
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- JAMES MATTHEW HOLDEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU CHAMBER CLEAN WITH INERT HYDROGEN HELIUM MIXTURE DURING WAF...
- Publication number 20140196746
- Publication date Jul 17, 2014
- Robert Dinsmore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINNED SHUTTER DISK FOR A SUBSTRATE PROCESS CHAMBER
- Publication number 20140196848
- Publication date Jul 17, 2014
- Applied Materials, Inc.
- BONNIE T. CHIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED PROCESSING OF POROUS DIELECTRIC, POLYMER-COATED SUBSTRAT...
- Publication number 20140068962
- Publication date Mar 13, 2014
- Applied Materials, Inc.
- GLEN T. MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pre-treatment to eliminate the defects formed during electrochemica...
- Publication number 20070080067
- Publication date Apr 12, 2007
- APPLIED MATERIALS, INC.
- Haiyang Gu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Contact ring spin during idle time and deplate for defect reduction
- Publication number 20040222101
- Publication date Nov 11, 2004
- APPLIED MATERIALS, INC.
- Hiral M. Ajmera
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Chamber having components with textured surfaces and method of manu...
- Publication number 20040180158
- Publication date Sep 16, 2004
- APPLIED MATERIALS, INC.
- Shyh-Nung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal deposition process with pre-cleaning before electrochemical d...
- Publication number 20040118697
- Publication date Jun 24, 2004
- APPLIED MATERIALS, INC.
- Mei Wen+
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Process chamber components having textured internal surfaces and me...
- Publication number 20030026917
- Publication date Feb 6, 2003
- Shyh-Nung Lin
- H01 - BASIC ELECTRIC ELEMENTS

Glen T. MORI

Person

Patents Grantslast 30 patents

Methods and apparatus for processing a substrate

Compliant robot blade for substrate support and transfer

Methods and apparatus for backside via reveal processing

Variable frequency microwave (VFM) processes and applications in se...

Substrate support apparatus having reduced substrate particle gener...

Compliant robot blade for defect reduction

Variable frequency microwave (VFM) processes and applications in se...

Structure and method of fabricating three-dimensional (3D) metal-in...

Variable frequency microwave (VFM) processes and applications in se...

Substrate transfer robot end effector

In situ chamber clean with inert hydrogen helium mixture during waf...

Methods and apparatus for cleaning a substrate

Integrated processing of porous dielectric, polymer-coated substrat...

Finned shutter disk for a substrate process chamber

Boron ionization for aluminum oxide etch enhancement

Chamber having components with textured surfaces and method of manu...

Chamber components having textured surfaces and method of manufacture

Preventing defect generation from targets through applying metal sp...

Method and apparatus for reducing target arcing during sputter depo...

Method for reducing particle concentration within a semiconductor d...

Method for manufacturing metal sputtering target for use in DC magn...

Target for use in magnetron sputtering of aluminum for forming meta...

Target for use in magnetron sputtering of aluminum for forming meta...

Method for reducing particulate generation from regeneration of cry...

Target for use in magnetron sputtering of aluminum for forming meta...

Patents Applicationslast 30 patents

SUBSTRATE SUPPORT CARRIER HAVING MULTIPLE CERAMIC DISCS

EROSION RESISTANT METAL FLUORIDE COATINGS, METHODS OF PREPARATION A...

METHODS AND APPARATUS FOR BACKSIDE VIA REVEAL PROCESSING

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

COMPLIANT ROBOT BLADE FOR DEFECT REDUCTION

VARIABLE FREQUENCY MICROWAVE (VFM) PROCESSES AND APPLICATIONS IN SE...

VARIABLE FREQUENCY MICROWAVE (VFM) PROCESSES AND APPLICATIONS IN SE...

STRUCTURE AND METHOD OF FABRICATING THREE-DIMENSIONAL (3D) METAL-IN...

SUBSTRATE TRANSFER ROBOT END EFFECTOR

SUBSTRATE SUPPORT APPARATUS HAVING REDUCED SUBSTRATE PARTICLE GENER...

BORON IONIZATION FOR ALUMINUM OXIDE ETCH ENHANCEMENT

COMPLIANT ROBOT BLADE FOR DEFECT REDUCTION

VARIABLE FREQUENCY MICROWAVE (VFM) PROCESSES AND APPLICATIONS IN SE...

METHODS AND APPARATUS FOR CLEANING A SUBSTRATE

IN SITU CHAMBER CLEAN WITH INERT HYDROGEN HELIUM MIXTURE DURING WAF...

FINNED SHUTTER DISK FOR A SUBSTRATE PROCESS CHAMBER

INTEGRATED PROCESSING OF POROUS DIELECTRIC, POLYMER-COATED SUBSTRAT...

Pre-treatment to eliminate the defects formed during electrochemica...

Contact ring spin during idle time and deplate for defect reduction

Chamber having components with textured surfaces and method of manu...

Metal deposition process with pre-cleaning before electrochemical d...

Process chamber components having textured internal surfaces and me...