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Glen Travis
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Methods for wafer proximity cleaning and drying
Patent number
6,616,772
Issue date
Sep 9, 2003
Lam Research Corporation
John Martin de Larios
B08 - CLEANING
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Patent Grant
Capillary proximity heads for single wafer cleaning and drying
Patent number
6,488,040
Issue date
Dec 3, 2002
Lam Research Corporation
John Martin de Larios
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Methods for wafer proximity cleaning and drying
Publication number
20030075204
Publication date
Apr 24, 2003
LAM RESEARCH CORPORATION
John Martin de Larios
B08 - CLEANING