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ALD of metal silicate films
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Patent number 8,563,444
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Issue date Oct 22, 2013
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ASM America, Inc.
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Chang-Gong Wang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of forming non-conformal layers
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Patent number 8,334,218
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Issue date Dec 18, 2012
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ASM America, Inc.
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Sebastian E. Van Nooten
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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ALD of metal silicate films
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Patent number 7,972,977
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Issue date Jul 5, 2011
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ASM America, Inc.
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Chang-Gong Wang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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ALD of metal silicate films
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Patent number 7,795,160
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Issue date Sep 14, 2010
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ASM America Inc.
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Chang-gong Wang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of forming non-conformal layers
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Patent number 7,608,549
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Issue date Oct 27, 2009
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ASM America, Inc.
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Sebastian E. Van Nooten
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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