Glenn D. Kubiak

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Condenser optic with sacrificial reflective surface
- Patent number 7,239,443
- Issue date Jul 3, 2007
- EUV LLC
- Daniel A. Tichenor
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Condenser optic with sacrificial reflective surface
- Patent number 7,081,992
- Issue date Jul 25, 2006
- EUV LLC
- Daniel A. Tichenor
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Radiation source with shaped emission
- Patent number 6,563,907
- Issue date May 13, 2003
- EUV LLC
- Glenn D. Kubiak
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Illumination system having a plurality of movable sources
- Patent number 6,396,068
- Issue date May 28, 2002
- EUV LLC
- William C. Sweatt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Condenser for extreme-UV lithography with discharge source
- Patent number 6,285,737
- Issue date Sep 4, 2001
- EUV LLC
- William C. Sweatt
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultraviolet lithography machine
- Patent number 6,031,598
- Issue date Feb 29, 2000
- EUV LLC
- Daniel A. Tichenor
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV...
- Patent number 6,011,267
- Issue date Jan 4, 2000
- EUV LLC
- Glenn D. Kubiak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for extreme ultraviolet lithography
- Patent number 6,007,963
- Issue date Dec 28, 1999
- Sandia Corporation
- T. E. Felter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Condenser optic with sacrificial reflective surface
- Publication number 20060245045
- Publication date Nov 2, 2006
- Daniel A. Tichenor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Condenser optic with sacrificial reflective surface
- Publication number 20050157383
- Publication date Jul 21, 2005
- Daniel A. Tichenor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Glenn D. Kubiak

Person

Patents Grantslast 30 patents

Condenser optic with sacrificial reflective surface

Condenser optic with sacrificial reflective surface

Radiation source with shaped emission

Illumination system having a plurality of movable sources

Condenser for extreme-UV lithography with discharge source

Extreme ultraviolet lithography machine

Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV...

Method for extreme ultraviolet lithography

Patents Applicationslast 30 patents

Condenser optic with sacrificial reflective surface

Condenser optic with sacrificial reflective surface