Glenn E. Peterson

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Glendale, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and process for cleaning a work piece
- Patent number 6,418,584
- Issue date Jul 16, 2002
- SpeedFam-IPEC Corporation
- Ned Teeny
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for cleaning and drying wafers
- Patent number 5,950,327
- Issue date Sep 14, 1999
- SpeedFam-IPEC Corporation
- Glenn E. Peterson
- H01 - BASIC ELECTRIC ELEMENTS