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Glenn Gale
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Tokyo-To, JP
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last 30 patents
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Patent Grant
Method for manufacturing semiconductor device
Patent number
7,897,498
Issue date
Mar 1, 2011
Tokyo Electron Limited
Glenn Gale
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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last 30 patents
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Patent Application
Method for Manufacturing Semiconductor Device
Publication number
20080268655
Publication date
Oct 30, 2008
Glenn Gale
H01 - BASIC ELECTRIC ELEMENTS