Glenn Gale

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for pattern collapse free wet processing of se...
- Patent number 8,440,573
- Issue date May 14, 2013
- Lam Research Corporation
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 8,043,521
- Issue date Oct 25, 2011
- Tokyo Electron Limited
- Glenn Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for processing a substrate using supercritical ca...
- Patent number 7,250,374
- Issue date Jul 31, 2007
- Tokyo Electron Limited
- Glenn Gale
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SE...
- Publication number 20110183522
- Publication date Jul 28, 2011
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing method and processing apparatus
- Publication number 20090011523
- Publication date Jan 8, 2009
- Glenn Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing method and processing apparatus
- Publication number 20060088959
- Publication date Apr 27, 2006
- Glenn Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for processing a substrate using supercritical ca...
- Publication number 20060003592
- Publication date Jan 5, 2006
- TOKYO ELECTRON LIMITED
- Glenn Gale
- H01 - BASIC ELECTRIC ELEMENTS