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Glenn Marshall
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Northampton, PA, US
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last 30 patents
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Patent Grant
Dark spin rinse/dry
Patent number
6,361,614
Issue date
Mar 26, 2002
Agere Systems Guardian Corp.
Bryan Chaeyoo Chung
B08 - CLEANING
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last 30 patents
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Patent Application
Reduced pressure irradiation processing method and apparatus
Publication number
20060016458
Publication date
Jan 26, 2006
Richard Novak
B08 - CLEANING