GLENN W. GALE

Person

ESSEX JUNCTION, VT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning contaminants from the surface of a substrate
- Patent number 6,783,599
- Issue date Aug 31, 2004
- International Business Machines Corporation
- Glenn W. Gale
- B08 - CLEANING
Information Patent Grant
Capillary dry process and apparatus
- Patent number 6,565,666
- Issue date May 20, 2003
- International Business Machines Corporation
- Russell H. Arndt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for recovery of semiconductor wafers from a ch...
- Patent number 6,514,355
- Issue date Feb 4, 2003
- International Business Machines Corporation
- Ernest Betancourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of drying substrates
- Patent number 6,508,014
- Issue date Jan 21, 2003
- International Business Machines Corporation
- Russell H. Arndt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for combined particle location and removal
- Patent number 6,356,653
- Issue date Mar 12, 2002
- International Business Machines Corporation
- Jeffrey A. Brigante
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for treating a semiconductor substrate
- Patent number 6,354,309
- Issue date Mar 12, 2002
- International Business Machines Corporation
- Russell H. Arndt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sonic cleaning with an interference signal
- Patent number 6,276,370
- Issue date Aug 21, 2001
- International Business Machines Corporation
- Emily E. Fisch
- B08 - CLEANING
Information Patent Grant
Selective etching of silicate
- Patent number 6,254,796
- Issue date Jul 3, 2001
- International Business Machines Corporation
- David L. Rath
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method for cleaning semiconductor devices
- Patent number 6,191,085
- Issue date Feb 20, 2001
- International Business Machines Corporation
- Emanuel I. Cooper
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Process for treating a semiconductor substrate
- Patent number 6,173,720
- Issue date Jan 16, 2001
- International Business Machines Corporation
- Russell H. Arndt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of silicon oxide
- Patent number 6,117,796
- Issue date Sep 12, 2000
- International Business Machines Corporation
- Glenn W. Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forced plug processing for high aspect ratio structures
- Patent number 5,966,631
- Issue date Oct 12, 1999
- International Business Machines Corporation
- Glenn W. Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning semiconductor devices
- Patent number 5,962,384
- Issue date Oct 5, 1999
- International Business Machines Corporation
- Emanuel I. Cooper
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
Method of cleaning contaminants from the surface of a substrate
- Publication number 20030015217
- Publication date Jan 23, 2003
- International Business Machines Corporation
- Glenn W. Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of drying substrates
- Publication number 20020112369
- Publication date Aug 22, 2002
- International Business Machines Corporation
- Russell H. Arndt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR COMBINED PARTICLE LOCATION AND REMOVAL
- Publication number 20010043734
- Publication date Nov 22, 2001
- JEFFREY A. BRIGANTE
- H01 - BASIC ELECTRIC ELEMENTS

GLENN W. GALE

Person

Patents Grantslast 30 patents

Method of cleaning contaminants from the surface of a substrate

Capillary dry process and apparatus

Method and apparatus for recovery of semiconductor wafers from a ch...

Method of drying substrates

Method and apparatus for combined particle location and removal

Process for treating a semiconductor substrate

Sonic cleaning with an interference signal

Selective etching of silicate

Method for cleaning semiconductor devices

Process for treating a semiconductor substrate

Removal of silicon oxide

Forced plug processing for high aspect ratio structures

Method for cleaning semiconductor devices

Patents Applicationslast 30 patents

Method of cleaning contaminants from the surface of a substrate

Method of drying substrates

METHOD AND APPARATUS FOR COMBINED PARTICLE LOCATION AND REMOVAL