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Glenn WHITENER

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  • Batavia, IL, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of polishing group III-V materials
    • Patent number 10,418,248
    • Issue date Sep 17, 2019
    • Cabot Microelectronics Corporation
    • Benjamin Petro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Composition and method for polishing silicon carbide
    • Patent number 10,294,399
    • Issue date May 21, 2019
    • Cabot Microelectronics Corporation
    • Roman Ivanov
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Tungsten processing slurry with catalyst
    • Patent number 10,066,126
    • Issue date Sep 4, 2018
    • Cabot Microelectronics Corporation
    • Kevin P. Dockery
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Slurry for chemical mechanical polishing of cobalt
    • Patent number 9,944,828
    • Issue date Apr 17, 2018
    • Cabot Microelectronics Corporation
    • Elise Sikma
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Composition for tungsten CMP
    • Patent number 9,566,686
    • Issue date Feb 14, 2017
    • Cabot Microelectronics Corporation
    • Steven Grumbine
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Composition for tungsten CMP
    • Patent number 9,303,189
    • Issue date Apr 5, 2016
    • Cabot Microelectronics Corporation
    • Steven Grumbine
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Mixed abrasive tungsten CMP composition
    • Patent number 9,303,190
    • Issue date Apr 5, 2016
    • Cabot Microelectronics Corporation
    • William Ward
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Composition for tungsten CMP
    • Patent number 9,303,188
    • Issue date Apr 5, 2016
    • Cabot Microelectronics Corporation
    • Steven Grumbine
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    CMP compositions selective for oxide and nitride with high removal...
    • Patent number 9,238,753
    • Issue date Jan 19, 2016
    • Cabot Microelectronics Corporation
    • Brian Reiss
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Composition for tungsten CMP
    • Patent number 9,238,754
    • Issue date Jan 19, 2016
    • Cabot Microelectronics Corporation
    • Steven Grumbine
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    GST CMP slurries
    • Patent number 8,778,211
    • Issue date Jul 15, 2014
    • Cabot Microelectronics Corporation
    • Matthias Stender
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Composition and method for polishing aluminum semiconductor substrates
    • Patent number 8,623,766
    • Issue date Jan 7, 2014
    • Cabot Microelectronics Corporation
    • Ji Cui
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

  • Information Patent Application

    COMPOSITION AND METHOD FOR POLISHING SILICON CARBIDE
    • Publication number 20190241783
    • Publication date Aug 8, 2019
    • Cabot Microelectronics Corporation
    • Roman IVANOV
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COMPOSITION AND METHOD FOR POLISHING SILICON CARBIDE
    • Publication number 20180190506
    • Publication date Jul 5, 2018
    • Cabot Microelectronics Corporation
    • Roman IVANOV
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF POLISHING GROUP III-V MATERIALS
    • Publication number 20170236718
    • Publication date Aug 17, 2017
    • Cabot Microelectronics Corporation
    • Benjamin PETRO
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    TUNGSTEN PROCESSING SLURRY WITH CATALYST
    • Publication number 20170190936
    • Publication date Jul 6, 2017
    • Cabot Microelectronics Corporation
    • Kevin P. Dockery
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    SLURRY FOR CHEMICAL MECHANICAL POLISHING OF COBALT
    • Publication number 20160108286
    • Publication date Apr 21, 2016
    • Cabot Microelectronics Corporation
    • Elise Sikma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COMPOSITION FOR TUNGSTEN CMP
    • Publication number 20160089763
    • Publication date Mar 31, 2016
    • Cabot Microelectronics Corporation
    • Steven GRUMBINE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GERMANIUM CHEMICAL MECHANICAL POLISHING
    • Publication number 20160053381
    • Publication date Feb 25, 2016
    • Cabot Microelectronics Corporation
    • Chih-Pin TSAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MIXED ABRASIVE TUNGSTEN CMP COMPOSITION
    • Publication number 20150267083
    • Publication date Sep 24, 2015
    • Cabot Microelectronics Corporation
    • William WARD
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    COMPOSITION FOR TUNGSTEN CMP
    • Publication number 20150259572
    • Publication date Sep 17, 2015
    • Cabot Microelectronics Corporation
    • Steven GRUMBINE
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    COMPOSITION FOR TUNGSTEN CMP
    • Publication number 20150259574
    • Publication date Sep 17, 2015
    • Cabot Microelectronics Corporation
    • Steven GRUMBINE
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    COMPOSITION FOR TUNGSTEN CMP
    • Publication number 20150259573
    • Publication date Sep 17, 2015
    • Cabot Microelectronics Corporation
    • Steven GRUMBINE
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    COMPOSITION AND METHOD FOR POLISHING ALUMINUM SEMICONDUCTOR SUBSTRATES
    • Publication number 20140103250
    • Publication date Apr 17, 2014
    • Ji Cui
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    GST CMP SLURRIES
    • Publication number 20140024216
    • Publication date Jan 23, 2014
    • Matthias STENDER
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    CMP COMPOSITIONS SELECTIVE FOR OXIDE AND NITRIDE WITH HIGH REMOVAL...
    • Publication number 20130244433
    • Publication date Sep 19, 2013
    • Cabot Microelectronics Corporation
    • Brian Reiss
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    COMPOSITION AND METHOD FOR POLISHING ALUMINUM SEMICONDUCTOR SUBSTRATES
    • Publication number 20130072021
    • Publication date Mar 21, 2013
    • Ji Cui
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...