Günes NAKIBOGLU

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature conditioning system
- Patent number 11,835,870
- Issue date Dec 5, 2023
- ASML Netherlands B.V.
- Güneş Nakiboğlu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,762,304
- Issue date Sep 19, 2023
- ASML Netherlands B.V.
- Güneş Nakiboğlu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
- Patent number 11,579,533
- Issue date Feb 14, 2023
- ASML Netherlands B.V.
- Günes Nakiboglu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus incorporating a gas lock
- Patent number 11,320,751
- Issue date May 3, 2022
- ASML Netherlands B.V.
- Güneş Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling system and method of thermally conditioni...
- Patent number 11,036,148
- Issue date Jun 15, 2021
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement system, lithographic apparatus and device manufacturing...
- Patent number 11,009,800
- Issue date May 18, 2021
- ASML Netherlands B.V.
- Han-Kwang Nienhuys
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,990,025
- Issue date Apr 27, 2021
- ASML Netherlands B.V.
- Laurentius Johannes Adrianus Van Bokhoven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for removing photosensitive material on a substrate
- Patent number 10,948,825
- Issue date Mar 16, 2021
- ASML Netherlands B.V.
- Christianus Wilhelmus Johannes Berendsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
- Patent number 10,895,808
- Issue date Jan 19, 2021
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation shielding device and apparatus comprising such shielding...
- Patent number 10,877,384
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Franciscus Johannes Joseph Janssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,775,707
- Issue date Sep 15, 2020
- ASML Netherlands B.V.
- Güneş Nakìboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,642,166
- Issue date May 5, 2020
- ASML Holding N.V.
- Güneş Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, a lithographic apparatus and a method of operating...
- Patent number 10,571,810
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Daan Daniel Johannes Antonius Van Sommeren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling system and method of thermally conditioni...
- Patent number 10,495,986
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,495,985
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,394,139
- Issue date Aug 27, 2019
- ASML Holding N.V.
- Güneş Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,345,717
- Issue date Jul 9, 2019
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, lithographic apparatus and method of operating a l...
- Patent number 10,317,804
- Issue date Jun 11, 2019
- ASML Netherlands B.V.
- Daan Daniel Johannes Antonius Van Sommeren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and a method of manufacturing a device
- Patent number 10,241,422
- Issue date Mar 26, 2019
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,222,713
- Issue date Mar 5, 2019
- ASML Netherlands B.V.
- Laurentius Johannes Adrianus Van Bokhoven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,133,197
- Issue date Nov 20, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,114,295
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,114,299
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,977,348
- Issue date May 22, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,939,740
- Issue date Apr 10, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONDITIONING SYSTEM
- Publication number 20220350265
- Publication date Nov 3, 2022
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTUR...
- Publication number 20210141312
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION SHIELDING DEVICE AND APPARATUS COMPRISING SUCH SHIELDING...
- Publication number 20200401058
- Publication date Dec 24, 2020
- ASML NETHERLANDS B.V.
- Franciscus Johannes Joseph Janssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20200379360
- Publication date Dec 3, 2020
- ASML NETHERLANDS B.V.
- Han-Kwang Nienhuys
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACT...
- Publication number 20200183287
- Publication date Jun 11, 2020
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REMOVING PHOTOSENSITIVE MATERIAL ON A SUBSTRATE
- Publication number 20200166845
- Publication date May 28, 2020
- ASML NETHERLANDS B.V.
- Christianus Wilhelmus Johannes BERENDSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation Source Module and Lithographic Apparatus
- Publication number 20200124976
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Hrishikesh PATEL
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONI...
- Publication number 20200103767
- Publication date Apr 2, 2020
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20200041916
- Publication date Feb 6, 2020
- ASML NETHERLANDS B.V.
- Günes NAKÌBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING APPARATUS
- Publication number 20190346777
- Publication date Nov 14, 2019
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING...
- Publication number 20190265597
- Publication date Aug 29, 2019
- ASML NETHERLANDS B.V.
- Daan Daniel Johannes Antonius VAN SOMMEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING APPARATUS
- Publication number 20190196345
- Publication date Jun 27, 2019
- ASML NETHERLANDS B.V.
- Laurentius Johannes Adrianus VAN BOKHOVEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING APPARATUS
- Publication number 20190121248
- Publication date Apr 25, 2019
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONI...
- Publication number 20190101837
- Publication date Apr 4, 2019
- ASML, Netherlands B.V.
- Hakki Ergün CEKLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190041761
- Publication date Feb 7, 2019
- ASML Netherlands B.V.
- Gunes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A L...
- Publication number 20180364584
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Daan Daniel Johannes Antonius VAN SOMMEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING APPARATUS
- Publication number 20180356740
- Publication date Dec 13, 2018
- ASML NETHERLANDS B.V.
- Laurentius Johannes Adrianus VAN BOKHOVEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20180299796
- Publication date Oct 18, 2018
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20180239258
- Publication date Aug 23, 2018
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus
- Publication number 20180101099
- Publication date Apr 12, 2018
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE
- Publication number 20180074416
- Publication date Mar 15, 2018
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170261864
- Publication date Sep 14, 2017
- ASML NETHERLANDS B.V.
- Gunes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20170219930
- Publication date Aug 3, 2017
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170160653
- Publication date Jun 8, 2017
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus
- Publication number 20170090296
- Publication date Mar 30, 2017
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160349631
- Publication date Dec 1, 2016
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Günes NAKIBOGLU

Person

Patents Grantslast 30 patents

Temperature conditioning system

Lithographic apparatus

Substrate holder, a lithographic apparatus and method of manufactur...

Apparatus incorporating a gas lock

Patterning device cooling system and method of thermally conditioni...

Measurement system, lithographic apparatus and device manufacturing...

Patterning device cooling apparatus

Method for removing photosensitive material on a substrate

Substrate holder, a lithographic apparatus and method of manufactur...

Radiation shielding device and apparatus comprising such shielding...

Lithographic apparatus and method

Patterning device cooling apparatus

Substrate table, a lithographic apparatus and a method of operating...

Patterning device cooling system and method of thermally conditioni...

Lithographic apparatus and device manufacturing method

Patterning device cooling apparatus

Lithographic apparatus and method

Substrate table, lithographic apparatus and method of operating a l...

Lithography apparatus and a method of manufacturing a device

Patterning device cooling apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

TEMPERATURE CONDITIONING SYSTEM

SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTUR...

RADIATION SHIELDING DEVICE AND APPARATUS COMPRISING SUCH SHIELDING...

MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACT...

METHOD FOR REMOVING PHOTOSENSITIVE MATERIAL ON A SUBSTRATE

Radiation Source Module and Lithographic Apparatus

PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONI...

Lithographic Apparatus and Method

PATTERNING DEVICE COOLING APPARATUS

SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING...

PATTERNING DEVICE COOLING APPARATUS

PATTERNING DEVICE COOLING APPARATUS

PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONI...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A L...

PATTERNING DEVICE COOLING APPARATUS

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND METHOD

Lithographic Apparatus

A LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic Apparatus

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD