Günter Maul

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for measuring lithography masks
- Patent number 8,253,947
- Issue date Aug 28, 2012
- Carl Zeiss SMS GmbH
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 6,750,949
- Issue date Jun 15, 2004
- AMSL Netherlands B.V.
- Erik Roelof Loopstra
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
- Publication number 20110205549
- Publication date Aug 25, 2011
- Carl Zeiss SMS GmbH
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20030058422
- Publication date Mar 27, 2003
- Erik Roelof Loopstra
- G02 - OPTICS