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Günter Maul
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Aalen, DE
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last 30 patents
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Patent Grant
Device and method for measuring lithography masks
Patent number
8,253,947
Issue date
Aug 28, 2012
Carl Zeiss SMS GmbH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,750,949
Issue date
Jun 15, 2004
AMSL Netherlands B.V.
Erik Roelof Loopstra
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
Publication number
20110205549
Publication date
Aug 25, 2011
Carl Zeiss SMS GmbH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20030058422
Publication date
Mar 27, 2003
Erik Roelof Loopstra
G02 - OPTICS