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Langebruck, DE
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Patents Grants
last 30 patents
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Patent Grant
Photomask and method of structuring a photoresist by double exposur...
Patent number
7,011,936
Issue date
Mar 14, 2006
Infineon Technologies AG
Christoph Nölscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for experimentally verifying imaging errors in photomasks
Patent number
6,800,407
Issue date
Oct 5, 2004
Infineon Technologies AG
Günther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for experimentally verifying imaging errors in optical expos...
Patent number
6,696,208
Issue date
Feb 24, 2004
Infineon Technologies AG
Günther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography method and lithography mask
Patent number
6,686,098
Issue date
Feb 3, 2004
Infineon Technologies AG
Günther Czech
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Photomask, method of lithographically structuring a photoresist lay...
Patent number
6,620,559
Issue date
Sep 16, 2003
Infineon Technologies AG
Günther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Photomask and method of structuring a photoresist by double exposur...
Publication number
20030143470
Publication date
Jul 31, 2003
Christoph Nolscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for experimentally verifying imaging errors in optical expos...
Publication number
20030054268
Publication date
Mar 20, 2003
Gunther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for experimentally verifying imaging errors in photomasks
Publication number
20030013022
Publication date
Jan 16, 2003
Gunther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask, method of lithographically structuring a photoresist lay...
Publication number
20020039691
Publication date
Apr 4, 2002
Gunther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY