Go Ayabe

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,538,700
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Go Ayabe
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,282,719
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Go Ayabe
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,668,494
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Go Ayabe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus
- Patent number 10,046,372
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Kazuya Goda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate transport method, and com...
- Patent number 10,043,692
- Issue date Aug 7, 2018
- TOKYO ELECTRONICS LIMITED
- Go Ayabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200373179
- Publication date Nov 26, 2020
- TOKYO ELECTRON LIMITED
- Go AYABE
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190304811
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Go Ayabe
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180085769
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Go Ayabe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSPORT METHOD, AND COM...
- Publication number 20170062251
- Publication date Mar 2, 2017
- TOKYO ELECTRON LIMITED
- Go AYABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20170028450
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Kazuya Goda
- B08 - CLEANING