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Tochigi-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Drawing apparatus, and method of manufacturing article by controlli...
Patent number
10,361,067
Issue date
Jul 23, 2019
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing apparatus and method of manufacturing article
Patent number
8,993,985
Issue date
Mar 31, 2015
Canon Kabushiki Kaisha
Kentaro Sano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus and method of manufacturing device
Patent number
7,612,868
Issue date
Nov 3, 2009
Canon Kabushiki Kaisha
Go Tsuchiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150090896
Publication date
Apr 2, 2015
Canon Kabushiki Kaisha
Go TSUCHIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150072445
Publication date
Mar 12, 2015
Canon Kabushiki Kaisha
Toshiro Yamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150001419
Publication date
Jan 1, 2015
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHODS RELATED THE...
Publication number
20140377891
Publication date
Dec 25, 2014
Go Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTU...
Publication number
20140320836
Publication date
Oct 30, 2014
Canon Kabushiki Kaisha
Wataru Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20140158903
Publication date
Jun 12, 2014
Canon Kabushiki Kaisha
Kentaro Sano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTUR...
Publication number
20140057212
Publication date
Feb 27, 2014
Canon Kabushiki Kaisha
Shinji OHISHI
G02 - OPTICS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20130199719
Publication date
Aug 8, 2013
Canon Kabushiki Kaisha
Go TSUCHIYA
B82 - NANO-TECHNOLOGY
Information
Patent Application
SCANNING EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
Publication number
20100007864
Publication date
Jan 14, 2010
Canon Kabushiki Kaisha
Go Tsuchiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
Publication number
20090081568
Publication date
Mar 26, 2009
Canon Kabushiki Kaisha
Go Tsuchiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
Publication number
20090002666
Publication date
Jan 1, 2009
Canon Kabushiki Kaisha
Go Tsuchiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY