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Goichi Yoshidome
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Narita-shi, JP
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last 30 patents
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Patent Application
PHYSICAL VAPOR DEPOSITION CHAMBER HAVING AN ADJUSTABLE TARGET
Publication number
20080116067
Publication date
May 22, 2008
Ilya Lavitsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Physical vapor deposition chamber having an adjustable target
Publication number
20060096851
Publication date
May 11, 2006
Ilya Lavitsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Physical vapor deposition chamber having a rotatable substrate pede...
Publication number
20060096857
Publication date
May 11, 2006
Ilya Lavitsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...