Gokhan HATIPOGLU

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State College, PA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ultra-high speed anisotropic reactive ion etching
- Patent number 9,966,232
- Issue date May 8, 2018
- The Penn State Research Foundation
- Srinivas Tadigadapa
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ULTRA-HIGH SPEED ANISOTROPIC REACTIVE ION ETCHING
- Publication number 20160099132
- Publication date Apr 7, 2016
- The Penn State Research Foundation
- Srinivas TADIGADAPA
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
ULTRA-HIGH SPEED ANISOTROPIC REACTIVE ION ETCHING
- Publication number 20140166618
- Publication date Jun 19, 2014
- The Penn State Research Foundation
- Srinivas TADIGADAPA
- B81 - MICRO-STRUCTURAL TECHNOLOGY