Gon-jun Kim

Person

Suwon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, signal source device, method of pro...
- Patent number 11,569,065
- Issue date Jan 31, 2023
- Samsung Electronics Co., Ltd.
- Sung-gil Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method using remote plasma source, and method of fabricatin...
- Patent number 10,418,250
- Issue date Sep 17, 2019
- Samsung Electronics Co., Ltd.
- Gon-jun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of generating plasma in remote plasma source and method of f...
- Patent number 9,966,274
- Issue date May 8, 2018
- Samsung Electronics Co., Ltd.
- Gon-jun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method using plasma, and method of fabricating semiconducto...
- Patent number 9,865,474
- Issue date Jan 9, 2018
- Samsung Electronics Co., Ltd.
- Gon-jun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of generating plasma in remote plasma source and method of f...
- Patent number 9,685,346
- Issue date Jun 20, 2017
- Samsung Electronics Co., Ltd.
- Gon-jun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing a substrate and apparatus for performing the same
- Patent number 9,105,581
- Issue date Aug 11, 2015
- Samsung Electronics Co., Ltd.
- Sam Hyung-sam Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PRO...
- Publication number 20230147992
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Sung-gil KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PRO...
- Publication number 20190393017
- Publication date Dec 26, 2019
- Samsung Electronics Co., Ltd.
- Sung-gil KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD USING REMOTE PLASMA SOURCE, AND METHOD OF FABRICATIN...
- Publication number 20180374709
- Publication date Dec 27, 2018
- Samsung Electronics Co., Ltd.
- Gon-jun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING PLASMA IN REMOTE PLASMA SOURCE AND METHOD OF F...
- Publication number 20170256415
- Publication date Sep 7, 2017
- Samsung Electronics Co., Ltd.
- Gon-jun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD USING PLASMA, AND METHOD OF FABRICATING SEMICONDUCTO...
- Publication number 20170062235
- Publication date Mar 2, 2017
- Samsung Electronics Co., Ltd.
- Gon-Jun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING PLASMA IN REMOTE PLASMA SOURCE AND METHOD OF F...
- Publication number 20160013064
- Publication date Jan 14, 2016
- Gon-jun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING A SUBSTRATE AND APPARATUS FOR PERFORMING THE SAME
- Publication number 20150155178
- Publication date Jun 4, 2015
- Samsung Electronics Co., Ltd.
- Sam Hyung-sam KIM
- H01 - BASIC ELECTRIC ELEMENTS

Gon-jun Kim

Person

Patents Grantslast 30 patents

Substrate processing apparatus, signal source device, method of pro...

Etching method using remote plasma source, and method of fabricatin...

Method of generating plasma in remote plasma source and method of f...

Etching method using plasma, and method of fabricating semiconducto...

Method of generating plasma in remote plasma source and method of f...

Method of processing a substrate and apparatus for performing the same

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PRO...

SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PRO...

ETCHING METHOD USING REMOTE PLASMA SOURCE, AND METHOD OF FABRICATIN...

METHOD OF GENERATING PLASMA IN REMOTE PLASMA SOURCE AND METHOD OF F...

ETCHING METHOD USING PLASMA, AND METHOD OF FABRICATING SEMICONDUCTO...

METHOD OF GENERATING PLASMA IN REMOTE PLASMA SOURCE AND METHOD OF F...

METHOD OF PROCESSING A SUBSTRATE AND APPARATUS FOR PERFORMING THE SAME