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Goon Heng WONG
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Tualath, OR, US
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last 30 patents
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Patent Application
IN-SITU WAFER THICKNESS AND GAP MONITORING USING THROUGH BEAM LASER...
Publication number
20240210163
Publication date
Jun 27, 2024
LAM RESEARCH CORPORATION
Goon Heng WONG
G01 - MEASURING TESTING
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Patent Application
FRONTSIDE AND BACKSIDE PRESSURE MONITORING FOR SUBSTRATE MOVEMENT P...
Publication number
20230141653
Publication date
May 11, 2023
LAM RESEARCH CORPORATION
Songqi GAO
H01 - BASIC ELECTRIC ELEMENTS