Gopalakrishna B. Prahbu

Follow

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of controlling a polishing machine
- Patent number 6,439,964
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Gopalakrishna B. Prahbu
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with controllable edge pressure
- Patent number 6,361,419
- Issue date Mar 26, 2002
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING