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Gordon Doering
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Projection objective for microlithography, projection exposure appa...
Patent number
8,228,483
Issue date
Jul 24, 2012
Carl Zeiss SMT GmbH
Ulrich Loering
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and apparatus for determining at least one optical property...
Patent number
7,760,345
Issue date
Jul 20, 2010
Carl Zeiss SMT AG
Matthias Manger
G01 - MEASURING TESTING
Information
Patent Grant
Device and method for the determination of imaging errors and micro...
Patent number
7,301,646
Issue date
Nov 27, 2007
Carl Zeiss SMT AG
Ulrich Wegmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY, PROJECTION EXPOSURE APPA...
Publication number
20100195070
Publication date
Aug 5, 2010
Carl Zeiss SMT AG
Ulrich Loering
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING AT LEAST ONE OPTICAL PROPERTY...
Publication number
20080204729
Publication date
Aug 28, 2008
Carl Zeiss SMT AG
Matthias Manger
G01 - MEASURING TESTING
Information
Patent Application
DEVICE AND METHOD FOR THE DETERMINATION OF IMAGING ERRORS AND MICRO...
Publication number
20080130012
Publication date
Jun 5, 2008
Carl Zeiss SMT AG
Ulrich Wegmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device and method for the determination of imaging errors and micro...
Publication number
20050190376
Publication date
Sep 1, 2005
Carl Zeiss SMT AG
Ulrich Wegmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY