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Goro Takahashi
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Oshu-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Heat treatment apparatus and method of controlling the same
Patent number
9,909,809
Issue date
Mar 6, 2018
Tokyo Electron Limited
Goro Takahashi
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Heat treatment apparatus and method of controlling the same
Patent number
9,207,665
Issue date
Dec 8, 2015
Tokyo Electron Limited
Goro Takahashi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Heat processing apparatus, method of automatically tuning control c...
Patent number
7,860,585
Issue date
Dec 28, 2010
Tokyo Electron Limited
Goro Takahashi
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF CONTROLLING THE SAME
Publication number
20130204416
Publication date
Aug 8, 2013
TOKYO ELECTRON LIMITED
Goro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF CONTROLLING THE SAME
Publication number
20130186878
Publication date
Jul 25, 2013
TOKYO ELECTRON LIMITED
Goro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat processing apparatus, method of automatically tuning control c...
Publication number
20080255683
Publication date
Oct 16, 2008
TOKYO ELECTRON LIMITED
Goro Takahashi
G05 - CONTROLLING REGULATING