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BASE PLATE AND SUBSTRATE ASSEMBLY
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Publication number 20230290665
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Publication date Sep 14, 2023
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ASML NETHERLANDS B.V.
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Gosse Charles DE VRIES
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H01 - BASIC ELECTRIC ELEMENTS
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RADIATION SYSTEM
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Publication number 20200152345
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Publication date May 14, 2020
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ASML NETHERLANDS B.V.
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Han-Kwang NIENHUYS
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithographic Apparatus
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Publication number 20190227445
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Publication date Jul 25, 2019
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ASML NETHERLANDS B.V.
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Frits VAN DER MEULEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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RADIATION BEAM APPARATUS
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Publication number 20180314164
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Publication date Nov 1, 2018
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ASML NETHERLANDS B.V.
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Jeroen DEKKERS
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Beam splitting apparatus
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Publication number 20180252930
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Publication date Sep 6, 2018
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ASML NETHERLANDS B.V.
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Gosse Charles DE VRIES
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H01 - BASIC ELECTRIC ELEMENTS
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REFLECTOR
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Publication number 20180239252
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Publication date Aug 23, 2018
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ASML NETHERLANDS B.V.
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Han-Kwang NIENHUYS
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHIC METHOD
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Publication number 20180081278
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Publication date Mar 22, 2018
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ASML NETHERLANDS B.V.
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Andrey Alexandrovich NIKIPELOV
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G01 - MEASURING TESTING
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RADIATION SYSTEM
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Publication number 20180031982
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Publication date Feb 1, 2018
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ASML NETHERLANDS B.V.
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Han-Kwang NIENHUYS
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G02 - OPTICS
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BEAM DELIVERY APPARATUS AND METHOD
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Publication number 20160225477
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Publication date Aug 4, 2016
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ASML NETHERLANDS B.V.
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Vadim Yevgenyevich BANINE
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G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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LITHOGRAPHIC METHOD
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Publication number 20160147161
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Publication date May 26, 2016
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ASML NETHERLANDS B.V.
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Andrey Alexandrovich NIKIPELOV
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHIC APPARATUS AND METHOD
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Publication number 20120105818
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Publication date May 3, 2012
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ASML Netherlands B.V.
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Jan Bernard Plechelmus Van Schoot
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHIC APPARATUS AND METHOD
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Publication number 20110205516
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Publication date Aug 25, 2011
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ASML NETHERLANDS B.V.
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Gosse Charles De Vries
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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