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Patents Grantslast 30 patents

Information Patent Grant
Tin trap device, extreme ultraviolet light generation apparatus, an...
- Patent number 11,940,736
- Issue date Mar 26, 2024
- Gigaphoton Inc.
- Gota Niimi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet chamber apparatus, extreme ultraviolet light ge...
- Patent number 11,145,429
- Issue date Oct 12, 2021
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
TIN TRAP DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AN...
- Publication number 20210364928
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Gota NIIMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GE...
- Publication number 20200312479
- Publication date Oct 1, 2020
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR