Gottlieb S. Oehrlein

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Clarksville, MD, US

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Patents Grantslast 30 patents

Information Patent Grant
Leveraging precursor molecular composition and structure for atomic...
- Patent number 11,171,013
- Issue date Nov 9, 2021
- University of Maryland, College Park
- Gottlieb S. Oehrlein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Achieving etching selectivity for atomic layer etching processes by...
- Patent number 10,790,157
- Issue date Sep 29, 2020
- University of Maryland, College Park
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor for plasma-based atomic layer etching of materials
- Patent number 9,620,382
- Issue date Apr 11, 2017
- University of Maryland, College Park
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for nanoscale plasma processing of objects
- Patent number 7,470,329
- Issue date Dec 30, 2008
- University of Maryland
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC-SCALE MATERIALS PROCESSING BASED ON ELECTRON BEAM INDUCED ET...
- Publication number 20230059730
- Publication date Feb 23, 2023
- University of Maryland, College Park
- Gottlieb S. OEHRLEIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Leveraging Precursor Molecular Composition and Structure for Atomic...
- Publication number 20200335352
- Publication date Oct 22, 2020
- University of Maryland
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR FOR PLASMA-BASED ATOMIC LAYER ETCHING OF MATERIALS
- Publication number 20150162168
- Publication date Jun 11, 2015
- University of Maryland, College Park
- Gottlieb S. OEHRLEIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for nanoscale plasma processing of objects
- Publication number 20050051517
- Publication date Mar 10, 2005
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS