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Gouichi Iwao
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Oita-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Liquid treatment apparatus, mounting and dismounting method of a cu...
Patent number
8,354,141
Issue date
Jan 15, 2013
Tokyo Electron Limited
Tsunenaga Nakashima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Liquid treatment apparatus, mounting and dismounting method of a cu...
Patent number
7,984,690
Issue date
Jul 26, 2011
Tokyo Electron Limited
Tsunenaga Nakashima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
LIQUID TREATMENT APPARATUS, MOUNTING AND DISMOUNTING METHOD OF A CU...
Publication number
20110220216
Publication date
Sep 15, 2011
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Liquid treatment apparatus, mounting and dismounting method of a cu...
Publication number
20080092813
Publication date
Apr 24, 2008
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY