Govinda RAJ

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
3D printed chamber components configured for lower film stress and...
- Patent number 11,569,069
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate support with real time force and film stress control
- Patent number 10,879,046
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Wendell Glen Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3D printed chamber components configured for lower film stress and...
- Patent number 10,777,391
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Cooled gas feed block with baffle and nozzle for HDP-CVD
- Patent number 10,662,529
- Issue date May 26, 2020
- Applied Materials, Inc.
- Govinda Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate distance monitoring
- Patent number 10,648,788
- Issue date May 12, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring for a substrate processing chamber
- Patent number 10,553,473
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Govinda Raj
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
Amalgamated cover ring
- Patent number 10,515,843
- Issue date Dec 24, 2019
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion control for chamber components
- Patent number 10,190,701
- Issue date Jan 29, 2019
- Applied Materials, Inc.
- Govinda Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal radiation barrier for substrate processing chamber components
- Patent number 10,177,014
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EMI/RF shielding of thermocouples
- Patent number 10,168,229
- Issue date Jan 1, 2019
- Applied Materials, Inc.
- Govinda Raj
- G01 - MEASURING TESTING
Information Patent Grant
Magnetron having enhanced cooling characteristics
- Patent number 10,141,153
- Issue date Nov 27, 2018
- Applied Materials, Inc.
- Govinda Raj
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Methods and apparatus for electrostatic chuck repair and refurbishment
- Patent number 10,049,908
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Govinda Raj
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Corrosion resistant abatement system
- Patent number 10,005,025
- Issue date Jun 26, 2018
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EMI/RF shielding of thermocouples
- Patent number 9,823,133
- Issue date Nov 21, 2017
- Applied Materials, Inc.
- Govinda Raj
- G01 - MEASURING TESTING
Information Patent Grant
Pad design for electrostatic chuck surface
- Patent number 9,613,846
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for electrostatic chuck repair and refurbishment
- Patent number 9,349,630
- Issue date May 24, 2016
- Applied Materials, Inc.
- Govinda Raj
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...
- Publication number 20200365374
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- B22 - CASTING POWDER METALLURGY
Information Patent Application
EMI/RF SHIELDING OF THERMOCOUPLES
- Publication number 20180017447
- Publication date Jan 18, 2018
- Applied Materials, Inc.
- Govinda RAJ
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE DISTANCE MONITORING
- Publication number 20170350688
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Wendell Glenn BOYD
- G01 - MEASURING TESTING
Information Patent Application
COOLED GAS FEED BLOCK WITH BAFFLE AND NOZZLE FOR HDP-CVD
- Publication number 20170191161
- Publication date Jul 6, 2017
- Applied Materials, Inc.
- Govinda RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMALGAMATED COVER RING
- Publication number 20170162422
- Publication date Jun 8, 2017
- Applied Materials, Inc.
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORROSION CONTROL FOR CHAMBER COMPONENTS
- Publication number 20170152968
- Publication date Jun 1, 2017
- Applied Materials, Inc.
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D PRINTED MAGNETRON HAVING ENHANCED COOLING CHARACTERISTICS
- Publication number 20170084418
- Publication date Mar 23, 2017
- Applied Materials, Inc.
- Govinda RAJ
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
- Publication number 20170076915
- Publication date Mar 16, 2017
- Applied Materials, Inc.
- Wendell Glen BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT
- Publication number 20160329230
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- Govinda RAJ
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
RADIALLY OUTWARD PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE
- Publication number 20160230269
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- Govinda RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...
- Publication number 20160233060
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER
- Publication number 20160181142
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Govinda RAJ
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
CORROSION RESISTANT ABATEMENT SYSTEM
- Publication number 20160107117
- Publication date Apr 21, 2016
- Applied Materials, Inc.
- Govinda RAJ
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE
- Publication number 20150146339
- Publication date May 28, 2015
- Applied Materials, Inc.
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT
- Publication number 20140268478
- Publication date Sep 18, 2014
- Govinda RAJ
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
THERMAL RADIATION BARRIER FOR SUBSTRATE PROCESSING CHAMBER COMPONENTS
- Publication number 20140165915
- Publication date Jun 19, 2014
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMI/RF SHIELDING OF THERMOCOUPLES
- Publication number 20110013669
- Publication date Jan 20, 2011
- Applied Materials, Inc.
- GOVINDA RAJ
- G01 - MEASURING TESTING

Govinda RAJ

Person

Patents Grantslast 30 patents

3D printed chamber components configured for lower film stress and...

Substrate support with real time force and film stress control

3D printed chamber components configured for lower film stress and...

Cooled gas feed block with baffle and nozzle for HDP-CVD

Substrate distance monitoring

Edge ring for a substrate processing chamber

Amalgamated cover ring

Corrosion control for chamber components

Thermal radiation barrier for substrate processing chamber components

EMI/RF shielding of thermocouples

Magnetron having enhanced cooling characteristics

Methods and apparatus for electrostatic chuck repair and refurbishment

Corrosion resistant abatement system

EMI/RF shielding of thermocouples

Pad design for electrostatic chuck surface

Methods and apparatus for electrostatic chuck repair and refurbishment

Patents Applicationslast 30 patents

3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...

EMI/RF SHIELDING OF THERMOCOUPLES

SUBSTRATE DISTANCE MONITORING

COOLED GAS FEED BLOCK WITH BAFFLE AND NOZZLE FOR HDP-CVD

AMALGAMATED COVER RING

CORROSION CONTROL FOR CHAMBER COMPONENTS

3D PRINTED MAGNETRON HAVING ENHANCED COOLING CHARACTERISTICS

SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL

METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT

RADIALLY OUTWARD PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE

3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...

EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER

CORROSION RESISTANT ABATEMENT SYSTEM

PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE

METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT

THERMAL RADIATION BARRIER FOR SUBSTRATE PROCESSING CHAMBER COMPONENTS

EMI/RF SHIELDING OF THERMOCOUPLES