Grace Hsiu-Ling Chen

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems configured to inspect a specimen
- Patent number 7,535,563
- Issue date May 19, 2009
- KLA-Tencor Technologies Corporation
- Grace Hsiu-Ling Chen
- G01 - MEASURING TESTING
Information Patent Grant
Dark field inspection apparatus and methods
- Patent number 7,436,503
- Issue date Oct 14, 2008
- KLA-Tencor Technologies Corp.
- Grace Hsiu-Ling Chen
- G01 - MEASURING TESTING